The AcuDep 300

TSW ADVANCED PARTICLE DEPOSITION SYSTEM Calibrated Particle Standards (CPS’s) are depositions of very accurately sized particles. The key phrase is “accurately sized.” These NIST-traceable standards are now commercially available at very reasonable prices. Researchers in the semiconductor industry have known for several years that there are serious discrepancies between true PSL size and the size the manufacturer lists on their bottle label. This uncertainty in PSL diameter (reported as high as ±25%) has resulted in scanner calibration problems and can cause difficulties when scanner comparisons are made. Diameter uncertainty for smaller particle sizes is particularly large and is a serious issue for meeting increased scanner sensitivity goals.

(U.S. Patent No. 6,833,028) A Particle Deposition System that is fast, accurate and easy to use!

WHAT DIFFERENTIATES ACUDEP 300? TSW has developed a methodology for sizing particles on a surface based on a combination of light scattering intensity as a function of scattering angle and a theoretical model for computing the scattering intensity. TSW asked NIST to assist with experimental and analysis issues related to traceability of particle sizing via light scattering measurement. Learn More * 44 deposition per 300mm wafer (can do 1cm dies, hard disks, etc.) * No manually handling once the wafer is loaded! * Utilizes differential mobility analyzer technology * Very accurate, reliable, and extremely easy to use * 30nm - 1µm particle size capability without spot size changing * Stainless Steel construction for class 1 cleanroom operation * SEMI S2-93A Certified Scanner calibration using only one wafer! PSL sizes backed by NIST statement on traceability. Calibration sets on one wafer available for: * ADE Constellation and CR-8X * KLA-Tencor SP-1, TBI, 6XXX series and others * Calibration sets also available on filmed wafers * Sizes from 40nm to 40µm!

TSW 701-738-0000